X-ray diffraction (XRD)
What we can do
The XRD deployed by LF comes with XRR (thin film X-ray reflectivity) functions. The XRD tool is based on the diffraction principle and the XRR is the reflection pattern of XRD aimed at measuring film thickness (up to 0.1nm thick), roughness of the sample surface and layers interface, electronic density of film, and even perform multi-layer film analysis for a total thickness below 500nm. This makes it ideal for analyzing film material characteristics non-destructively.
What is XRD?
X-ray diffraction analysis (XRD), is designed to identify material crystal structure, crystal orientation, and grains size of nanometer crystal, as well as residual stress analysis of mono- and poly-crystalline film material by pairing the X-ray diffraction pattern of crystal against databases in a non-destructive manner.
The Superiority Of LF
- Crystal structure analysis (lattice)
- Crystallinity analysis
- Texture analysis
- Thin film residual stress analysis
- RSM (Reciprocal Space Mapping) analysis
- XRR analysis