White light interferometry (WLI)
What is WLI?
White light interferometry (WLI) is one of the Optical Profiler (OP) with a non-contact 3D optical method. This technology employs low coherence characteristics of white light to generate interference waves by reflecting light from objects and reference surfaces through a beam splitter which, in turn, is used to get the surface profile based on the optical path difference.
The Superiority Of LF
- Wafer Measurement Of Semiconductor Industry.
- MEMS、IC Packaging、Measurement Of Precision Machinery Components.
- Size Measurement Of Displayer、Solar Energy And LED Industry.