White light interferometry (WLI)
What is WLI?
White light interferometry (WLI) is one of the Optical Profiler (OP) with a non-contact 3D optical method. This technology employs low coherence characteristics of white light to generate interference waves by reflecting light from objects and reference surfaces through a beam splitter which, in turn, is used to get the surface profile based on the optical path difference.
The Superiority Of LF
Applied Industry
Superiority
Equipment Capacity
Applied Industry
- Wafer Measurement Of Semiconductor Industry.
- MEMS、IC Packaging、Measurement Of Precision Machinery Components.
- Size Measurement Of Displayer、Solar Energy And LED Industry.
Superiority
Equipment Capacity
Bruker Contour GT-K Elite
- Model：Bruker Contour GT-K Elite
- Sample Size： W200mm X L200mm X H50 Mm (8”Wafer Compatible)
- Maximum Weight：4.5kg (10 Lbs.)
- Depth Measurement Range：Max. 9mm
- Nanoscale Depth Solution：~0.1nm
- Maximum Analysis Scope：2.3*1.7mm2(Single Image)
- Thick/Thin Film(Measurable Thickness)：<=2μm(Specific Material) ; >2μm (Known Material Refractive Index Needed)
- Automatic Stitching Function To Create A Large Composite Image
Case Sharing
Surface Roughness Parameter
3D surface profiler
Film Thickness Measurement
Automatic stitching function to composite a large image
Surface Roughness Parameter
3D surface profiler
Film Thickness Measurement
Automatic stitching function to composite a large image
why choose lab first
EXPERTS team
Joint diagnostics Service
