XPS/ESCA
What we can do
XPS is capable of obtaining information of surface element distribution and chemical bonds, and the analysis is not affected by conductivity of the sample.
What is XPS/ESCA?
XPS is based on the principle of the photoelectric effect. Electrons within the inner layer of atoms are excited into photoelectrons once an X-ray penetrates a sample. Photoelectrons close to the material surface will escape the surface and get detected by the instrument which can be used to identify the composition of surface elements and determine their chemical bonds.
The Superiority Of LF
Application
Superiority
Applied Industry
Equipment Capacity
Application
- Surface survey: ingredient analysis of material within 100A on surface of sample
- Narrow scan: chemical bonding configuration analysis within 100A on surface of sample
- Oxidation analysis of sample (Oxidation depth and Oxidation state)
- Depth profile analysis: via Ar ion sputtering of sample surface, acquire signals of elements at different depths in the vertical profile.
- Spectrum mapping: analyze specimen zonal element signals for acquiring zonal elements distribution image.
- Line scanning: analyze linear element signals of specimen for acquiring linear element distribution map.
Superiority
The high resolution XPS – Quantera II Scanning X-ray Photoelectron Spectroscopy acquired by LF is capable of micro area analysis as fine as 7.5um, compared to the 50um capability of conventional XPS, offering more refined structure analysis of sample surface that can satisfy industry needs.
Applied Industry
In semiconductor, LED, PCP and panel manufacturing industry, surface element survey plays a vital role in product development and production monitoring.
Equipment Capacity
PHI Quantera II
- X-Ray minimum spot size: 7.5um
- Energy resolution: 0.48 EV (Ag3d5/2)
- Specimen positioning: SPS optical and SXI imaging
Case Sharing
Surface survey
Narrow Scan
Depth Profile
XI (Scanning X-ray Induced secondary electron image)
Surface survey
Narrow Scan
Depth Profile
XI (Scanning X-ray Induced secondary electron image)
(Beam size : 7.5um)
Why Choose Lab First
EXPERTS team
Joint diagnostics Service
