Auger Electron Spectroscopy (AES)
What we can do
AES features nano-grade single spot and ultra-surface (<10nm) analysis capacity combining with built-in Ion gun etching (Ar) to identify distribution ratio of elements at layers of different depths.
What is WLI?
Auger Electron Spectroscopy (AES) is a highly sensitive surface analysis technique which employs an electron-beam-based excitation source and features a detection depth down to 10nm.
The Superiority Of LF
- Survey of the sample surface.
- Auger depth profile (Etch sample surface with Ar+(3kV 1uA) for depth profiling).
- Auger mapping (Element distribution mapping within a specified area).