AES features nano-grade single spot and ultra-surface (<10nm) analysis capacity combining with built-in Ion gun etching (Ar) to identify distribution ratio of elements at layers of different depths.
What is WLI?
Auger Electron Spectroscopy (AES) is a highly sensitive surface analysis technique which employs an electron-beam-based excitation source and features a detection depth down to 10nm.
The Superiority Of LF
Application
Applied Industry
Equipment Capacity
Application
Survey of the sample surface.
Auger depth profile (Etch sample surface with Ar+(3kV 1uA) for depth profiling).
Auger mapping (Element distribution mapping within a specified area).
Applied Industry
Applicable To The Study Of Electrical Engineering, Mechanical Engineering, Material, Chemical, Chemical Engineering And So On.