Emission Microscope (EMMI)
What we can do
EMMI is used extensively for detecting leakage current resulting from device defects, e.g., Gate oxide defects, ESD Failure, Latch Up, Junction Leakage, and Forward bias; a transistor running in its saturation region may have its hot spots positioned by EMMI to identify defect causes for failure analysis later.
What is Emission Microscope (EMMI)?
The Emission Microscope (EMMI) is a tool for failure analysis positioning. EMMI consists of a highly-sensitive CCD capable of detecting photons emitted when the electron/electric-hole pair reunites in the device, a faint light of a wavelength between 350 nm ~ 1100 nm, the range equivalent to visible and IR light.
Find hot spots by EMMI
Tips for Hot Spots Analysis
Conditions Where Hot Spots Are Detected:
- Defects that cause hot spots
- Junction leakage
- Contact spiking
- Hot electrons
- Gate Oxide defects / leakage(F-N Current)
- Poly-silicon filaments
- Substrate damage
- Mechanical damage
- Junction avalanche
- Hot spots that existed originally
- Saturated/ active bipolar tansistors
- Saturated MOS/ dynamic CMOS
- Forward biased diodes /Reverse biased diodes(breakdown)
Conditions Where Hot Spots Cannot Be Detected:
- Defects without light spots
- Ohmic short and metal short
- Hot spots being blocked
- Buried junctions
- Buried junctions and leakage sites under metals.
Limited by lens rotation angles, a maximum of 4 probe manipulators (4 Probe tips) can be installed on the stage. Maximum height of sample: 10 Cm. Requires totally-dark-chamber operation without the existence of light emitting devices.